Direct observation of the CVD growth of monolayer MoS₂ using in situ optical spectroscopy

• Claudia Beatriz López-Posadas,
• Yaxu Wei,
• Wanfu Shen,
• Daniel Kahr,
• Michael Hohage and
• Lidong Sun

Beilstein J. Nanotechnol. 2019, 10, 557–564, doi:10.3762/bjnano.10.57

• dichalcogenide (2D TMDC) materials. However, it is very challenging to carry out such studies during chemical vapor deposition (CVD). Here, we report the first, real time, in situ study of the CVD growth of 2D TMDCs. More specifically, the CVD growth of a molybdenum disulfide (MoS2) monolayer on sapphire

• spectroscopy; molybdenum disulfide (MoS2) monolayer; two-dimensional transition-metal dichalcogenides (2D TMDC); Introduction Two-dimensional transition metal dichalcogenide (2D TMDC) materials have drawn wide attention because of their fascinating physical and chemical properties [1][2][3][4][5][6]. Given